Web9 nov. 2015 · Guiding x rays is usually a straight-line affair, but researchers have now created a curved waveguide, miniaturized to fit on a chip. The waveguide is a nanoscale … WebA structure that includes a substrate, typically a semiconductor chip such as a VCSEL or photodetector chip, and a guide for aligning a signal conveying device, typically an …

The Basics of Microlithography

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Lithography principles - Technology ASML

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